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Analysis of defective patterns on wafers in semiconductor manufacturing: A bibliographical review.

Bong-Jin YumJae Hoon KooSeong-Jun Kim
Published in: CASE (2012)
Keyphrases
  • semiconductor manufacturing
  • data analysis
  • literature review
  • process control
  • discrete event simulation
  • database
  • image processing
  • multi agent systems
  • hidden markov models
  • frequent patterns
  • electron beam