Login / Signup

Multi-objective genetic algorithms for reducing mark read-out effort in lithographic tests.

Pierluigi FriscoTimo BootsmaThomas Bäck
Published in: GECCO (Companion) (2019)
Keyphrases
  • multi objective genetic algorithms
  • multi objective
  • multi objective optimization
  • multi objective genetic algorithm
  • electron beam
  • lower bound
  • evolutionary algorithm
  • genetic algorithm
  • search algorithm