Neural network based uniformity profile control of linear chemical-mechanical planarization.
Jingang YiYe ShengC. Shan XuPublished in: CDC (2003)
Keyphrases
- neural network
- control system
- real time
- control theory
- linear systems
- control method
- optimal control
- multiscale
- database
- multi agent systems
- expert systems
- search engine
- least squares
- user profiles
- data acquisition
- control strategy
- artificial intelligence
- genetic algorithm
- control strategies
- data sets
- electro mechanical