Integrated single and multi-layer Si3N4 platform for ultralow loss propagation and small bending radii.
Daryl T. SpencerMartijn J. R. HeckRenan MoreiraJock BovingtonJohn E. BowersArne LeinseH. H. Van den VlekkertRené G. HeidemanMarcel HoekmanTheo T. VeenstraPublished in: OFC (2014)