Login / Signup

Atomic visualization of the emergence of orthorhombic phase in Hf0.5Zr0.5O2 ferroelectric film with in-situ rapid thermal annealing.

Tianjiao XinYonghui ZhengYan ChengKai DuYiwei WangZhaomeng GaoDiqing SuYunzhe ZhengQilan ZhongCheng LiuRong HuangChungang DuanSannian SongZhitang SongHangbing Lyu
Published in: VLSI Technology and Circuits (2022)
Keyphrases