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On predictive supervisory control of automation structures for semiconductor fab using factory communications and SPNs.
Heinz Westphal
Stephan Gramlich
Published in:
SMC (1998)
Keyphrases
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supervisory control
discrete event
data acquisition
production line
power grid
human operators
wafer fabrication
neural network
data mining
control system
intelligent systems
communication networks
control scheme
fault detection and diagnosis