Gradient-Based Source and Mask Optimization in Optical Lithography.
Yao PengJinyu ZhangYan WangZhiping YuPublished in: IEEE Trans. Image Process. (2011)
Keyphrases
- optimization algorithm
- electron beam
- global optimization
- optimization problems
- optimization methods
- artificial intelligence
- optimization strategies
- social networks
- cost function
- optimization method
- combinatorial optimization
- optimization process
- optimization model
- optimal design
- joint optimization
- discrete optimization