Fabrication of a micro humidity sensor with polypyrrole using the CMOS process.
Ching-Liang DaiDe-Hao LuPublished in: NEMS (2010)
Keyphrases
- data acquisition
- sensor data
- sensor networks
- monitoring system
- multi sensor
- real time
- high density
- integrated circuit
- health monitoring
- high speed
- energy consumption
- fiber bragg grating
- thin film transistor
- multiscale
- data sets
- video sequences
- database systems
- sensor readings
- range sensors
- three dimensional
- sensor technology
- imaging sensors
- vision sensor
- sensor web
- artificial intelligence