Challenges of monolithic integration for SiGe MEMS technology.

A. Ray Chaudhuri S. Severi P. Helin L. A. Francis H. A. C. Tilmans

Published in: IEEE SENSORS (2016)

Keyphrases

technical solutions
lessons learned
future trends
rapid development
solar cell
data processing
case study
technological advances
open issues
data integration
key technologies
thin film
social networks
key findings
databases
information technology
key issues
technical challenges
real world