Lot allocation and process control in semiconductor manufacturing - a dynamic game approach.
Nital S. PatelPublished in: CDC (2004)
Keyphrases
- process control
- semiconductor manufacturing
- discrete event simulation
- control system
- product quality
- intelligent control
- manufacturing process
- production system
- game theory
- graduate education
- computer games
- cooperative
- optimal allocation
- control charts
- game playing
- educational games
- resource allocation
- dynamic environments
- game design
- evaluation function
- virtual world
- knowledge management
- fuzzy logic
- artificial neural networks
- real time