Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing.

Seong Jin Yim Doo Yong Lee

Published in: SMC (1998)

Keyphrases

wafer fabrication
simulated annealing
candidate list
tabu search
dispatching rule
metaheuristic
scheduling problem
genetic algorithm
evolutionary algorithm
computer vision
optimal solution
search algorithm
special case
multi objective
data points
optimization problems