Linear time algorithm to find all relocation positions for EUV defect mitigation.
Yuelin DuHongbo ZhangQiang MaMartin D. F. WongPublished in: ASP-DAC (2013)
Keyphrases
- worst case
- times faster
- computational cost
- optimization algorithm
- optimal solution
- cost function
- experimental evaluation
- path planning
- dynamic programming
- preprocessing
- detection algorithm
- particle swarm optimization
- estimation algorithm
- matching algorithm
- genetic algorithm
- expectation maximization
- computationally efficient
- segmentation algorithm
- simulated annealing
- high accuracy
- clustering method
- ant colony optimization
- tree structure
- np hard
- hidden markov models
- face recognition
- improved algorithm
- learning algorithm