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Generation lifetime improvement on MOS capacitor by fast neutron enhanced intrinsic gettering technique.
Wu-Yih Uen
Shan-Ming Lan
Sen-Mao Liao
Jing-Ting Chiou
Published in:
Microelectron. J. (2003)
Keyphrases
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life span
low cost
data sets
genetic algorithm
information systems
case study
geometric structure
learning algorithm
high speed
generation process
generation algorithm