An Efficient Scheduling Method for Single-Arm Cluster Tools With Multifunctional Process Modules.
WenQing XiongJie LiYan QiaoLiping BaiBaoying HuangNaiQi WuPublished in: IEEE Trans. Syst. Man Cybern. Syst. (2023)
Keyphrases
- experimental evaluation
- high accuracy
- high precision
- synthetic data
- detection method
- computationally efficient
- edge detection
- significant improvement
- probabilistic model
- optimization algorithm
- matching process
- computational complexity
- optimization process
- classification process
- statistical methods
- face recognition
- recognition process
- clustering method
- detection algorithm
- prior knowledge
- evolutionary algorithm
- objective function