Design methodology of closed loop MEMS capacitive accelerometers based on ΣΔ modulation technique.

Procheta Chatterjee Sougata Kar Siddhartha Sen

Published in: VDAT (2016)

Keyphrases

design methodology
closed loop
open loop
control system
feedback control
control law
control scheme
design process
parameter identification
object oriented
fuzzy neural network
formal specification
pid controller
neural network
decision making
manufacturing systems