Determining constant voltage lifetimes for silicon nitride capacitors in a GaAs IC process by a step stress method.
Charles S. WhitmanMichael MeederPublished in: Microelectron. Reliab. (2005)
Keyphrases
- high accuracy
- high precision
- detection method
- iterative process
- cost function
- computational cost
- significant improvement
- recognition process
- decision trees
- multi step
- preprocessing
- input data
- matching algorithm
- clustering method
- optimization algorithm
- support vector machine svm
- data sets
- objective function
- feature selection