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An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology.
Hua Li
Linxiu Jiang
Chaoqun Guo
Jianmin Zhu
Yongrong Jiang
Zhencheng Chen
Published in:
Sensors (2017)
Keyphrases
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cost effective
high speed
cmos technology
low cost
input output
technological advances
case study
data processing
computer systems
personal computer
key technologies
optimal design
dynamic range
analog vlsi
nm technology