Sampling Decision System in semiconductor manufacturing using Virtual Metrology.
Daniel KurzCristina De LucaJürgen PilzPublished in: CASE (2012)
Keyphrases
- semiconductor manufacturing
- process control
- discrete event simulation
- decision making
- virtual environment
- virtual reality
- decision makers
- control system
- virtual world
- decision model
- decision process
- augmented reality
- production system
- monte carlo
- sampling strategy
- random sampling
- decision rules
- decision processes
- decision problems
- real time
- influence diagrams
- dynamic programming
- reinforcement learning
- sampling rate
- decision trees
- virtual laboratory
- website
- information retrieval