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Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor.

Myoung-Ock ChoWoojin JangSi-Hyung Lim
Published in: Sensors (2021)
Keyphrases
  • magneto optic
  • high density
  • databases
  • multiscale
  • high speed
  • evaluation criteria
  • evaluation model
  • real time
  • knowledge base
  • sensor networks
  • gold standard
  • integrated circuit
  • flow patterns