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L2O-ILT: Learning to Optimize Inverse Lithography Techniques.

Binwu ZhuSu ZhengZiyang YuGuojin ChenYuzhe MaFan YangBei YuMartin D. F. Wong
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2024)
Keyphrases
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