A micro and low-cost packaging technology of high accuracy piezoresistive pressure sensors with Parylene coating.
Shaoxiao NieYilong HaoFanrui MengChenhchen GaoZhenchuan YangPublished in: NEMS (2023)
Keyphrases
- low cost
- high accuracy
- cost effective
- sensor technology
- real time
- low cost sensors
- high speed
- low power
- data acquisition
- case study
- sensor networks
- time of flight
- design process
- rapid development
- technological advances
- sensory data
- rapid convergence
- sensor data
- digital camera
- multi sensor
- highly efficient
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- st century
- data sets