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Plastic analysis for through silicon via with actual etching defect of triangular-teeth and scallops.

Yun-Na SunDongwoo KangYazhou ZhangJiangbo LuoYanmei LiuYan WangGuifu Ding
Published in: Microelectron. Reliab. (2017)
Keyphrases
  • neural network
  • genetic algorithm
  • artificial neural networks
  • data sets
  • machine learning
  • multi agent systems
  • defect detection