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Surface property study of different patterning sapphire structures by ICP-RIE.

Chun-Ming ChangMing-Hua ShiaoDonyau ChiangMao-Jung HuangChin-Tien YangWen-Jeng Hsueh
Published in: NEMS (2013)
Keyphrases
  • empirical studies
  • range images
  • surface reconstruction
  • pairwise
  • statistical analysis
  • experimental study
  • theoretical framework
  • closed form