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Virtual metrology for run-to-run control in semiconductor manufacturing.
Pilsung Kang
Dongil Kim
Hyoungjoo Lee
Seungyong Doh
Sungzoon Cho
Published in:
Expert Syst. Appl. (2011)
Keyphrases
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semiconductor manufacturing
process control
control system
computer vision
virtual environment
neural network
real world
artificial neural networks
database systems
fuzzy logic
production system
discrete event simulation