Virtual metrology for run-to-run control in semiconductor manufacturing.

Pilsung Kang Dongil Kim Hyoungjoo Lee Seungyong Doh Sungzoon Cho

Published in: Expert Syst. Appl. (2011)

Keyphrases

semiconductor manufacturing
process control
control system
computer vision
virtual environment
neural network
real world
artificial neural networks
database systems
fuzzy logic
production system
discrete event simulation