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Capacitive micromachined ultrasonic transducer as a resonant temperature sensor.

Zhikang LiLibo ZhaoZhiying YeHongyan WangYulong ZhaoZhuangde Jiang
Published in: NEMS (2013)
Keyphrases
  • magneto optic
  • heat flow
  • sensor data
  • sensor networks
  • frequency band
  • sensor fusion
  • high temperature
  • real time
  • sensor web
  • neural network
  • multi sensor
  • high sensitivity
  • image sequences
  • fiber bragg grating