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Lithography hotspot detection: From shallow to deep learning.
Haoyu Yang
Yajun Lin
Bei Yu
Evangeline F. Y. Young
Published in:
SoCC (2017)
Keyphrases
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deep learning
machine learning
unsupervised learning
unsupervised feature learning
question answering
mental models
natural language processing
model selection
restricted boltzmann machine
object recognition
viewpoint
information extraction