Note on CapsNet-Based Wafer Map Defect Pattern Classification.
Itsuki FujitaYoshikazu NagamuraMasayuki AraiSatoshi FukumotoPublished in: ATS (2021)
Keyphrases
- pattern classification
- feature extraction
- nearest neighbor rule
- vowel recognition
- integrated circuit
- pattern recognition
- fuzzy classifier
- radial basis function neural network
- decision boundary
- probabilistic neural network
- semiconductor manufacturing
- pattern classification problems
- parzen window
- mass spectrometry data
- neural network
- probability distribution
- microarray
- object recognition