Polynomial time optimal algorithm for stencil row planning in e-beam lithography.
Daifeng GuoYuelin DuMartin D. F. WongPublished in: ASP-DAC (2015)
Keyphrases
- worst case
- dynamic programming
- optimal solution
- computational complexity
- preprocessing
- learning algorithm
- objective function
- strongly polynomial
- causal graph
- optimal parameters
- globally optimal
- convergence rate
- closed form
- simulated annealing
- np hard
- cost function
- similarity measure
- optimization algorithm
- computational cost
- knapsack problem
- optimal plans
- min cost
- feature selection