Model Based Layout Pattern Dependent Metal Filling Algorithm for Improved Chip Surface Uniformity in the Copper Process.
Subarna SinhaJianfeng LuoCharles C. ChiangPublished in: ASP-DAC (2007)
Keyphrases
- improved algorithm
- learning algorithm
- detection algorithm
- matching algorithm
- dynamic programming
- three dimensional
- optimal solution
- computational complexity
- recognition algorithm
- significant improvement
- computational cost
- particle swarm optimization
- low cost
- np hard
- cost function
- search space
- hardware implementation
- optimization process
- worst case
- model free
- pattern matching
- optimization algorithm
- segmentation algorithm
- preprocessing
- data structure
- decision trees