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Design and control of a single-chip SOI-MEMS atomic force microscope.

Mohammad MaroufiMichael G. RuppertAnthony G. FowlerS. O. Reza Moheimani
Published in: ACC (2017)
Keyphrases
  • single chip
  • low cost
  • low power
  • control system
  • image analysis
  • multimedia
  • high speed
  • power consumption
  • machine vision
  • efficient implementation
  • low power consumption
  • embedded processors
  • cmos image sensor