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A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization.
Haoshu Cai
Jianshe Feng
Qibo Yang
Wenzhe Li
Xiang Li
Jay Lee
Published in:
Comput. Ind. (2020)
Keyphrases
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gaussian process
bayesian framework
model selection
machine learning
similarity measure
edge detection
error rate
gaussian process regression
feature space
prior knowledge
missing data
density estimation
approximate inference
gaussian processes
expectation propagation