Novel Optical Probing System for Quarter-micron VLSI Circuits.

K. Ozaki H. Sekiguchi S. Wakana Y. Goto Y. Umehara J. Matsumoto

Published in: Asian Test Symposium (1997)

Keyphrases

vlsi circuits
electron beam
low power
x ray
fiber optic
integrated circuit
cmos technology
real time
digital images
high speed
pattern matching
power consumption
image sensor