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Line-to-line repetitive control of a 6-DoF hexapod stage for overlay measurements using Atomic Force Microscopy.
Gert Witvoet
Joost Peters
Stefan Kuiper
Tom Oomen
Published in:
ACC (2019)
Keyphrases
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line segments
degrees of freedom
line drawings
measured data
atomic force microscopy
path planning
control method
robotic manipulator