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Line-to-line repetitive control of a 6-DoF hexapod stage for overlay measurements using Atomic Force Microscopy.

Gert WitvoetJoost PetersStefan KuiperTom Oomen
Published in: ACC (2019)
Keyphrases
  • line segments
  • degrees of freedom
  • line drawings
  • measured data
  • atomic force microscopy
  • path planning
  • control method
  • robotic manipulator