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Effect of a trace of water vapor on Ohmic contact formation for AlGaN/GaN epitaxial wafers.

W. S. LauW. T. WongJoy B. H. TanB. P. Singh
Published in: Microelectron. Reliab. (2008)
Keyphrases
  • relative humidity
  • water supply
  • computer vision
  • bayesian networks
  • thin film
  • diffusion process
  • negative impact
  • real time
  • neural network
  • similarity measure
  • binary images