Resonant frequency tunable silicon fishbone-shaped MEMS double ended tuning fork.

Hong Ding Lifeng Fu Yixiang Wang Jin Xie

Published in: NEMS (2016)

Keyphrases

resonant frequency
microstrip antenna
magnetic field
low cost
high speed
high density
state space search
parameter tuning
parameter settings
rule selection
neural network
constraint satisfaction
physical design
space charge