Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing.
Yuichi HamamuraChizu MatsumotoYoshiyuki TsunodaKoji KamodaYoshio IwataKenji KanamitsuDaisuke FujikiFujihiko KojikaHiromi FujitaYasuo NakagawaShun'ichi KanekoPublished in: IEICE Trans. Electron. (2009)