A Routing Method Using Directed Grid-Graph for Self-Aligned Quadruple Patterning.
Takeshi IharaToshiyuki HongoAtsushi TakahashiChikaaki KodamaPublished in: IEICE Trans. Fundam. Electron. Commun. Comput. Sci. (2017)
Keyphrases
- detection method
- experimental evaluation
- significant improvement
- synthetic data
- similarity measure
- dynamic programming
- graph construction
- high accuracy
- neural network
- pairwise
- preprocessing
- objective function
- prior knowledge
- computational cost
- probabilistic model
- computational complexity
- learning algorithm
- segmentation method
- classification method
- graph matching
- genetic algorithm