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Intelligent Design of Diagnosable Systems: A Case Study of Semiconductor Manufacturing Machines.

YuanLin WenSheng-Luen ChungLi-Der JengMuDer Jeng
Published in: KES (2) (2007)
Keyphrases
  • semiconductor manufacturing
  • intelligent design
  • reasoning systems
  • complex systems
  • diagnostic reasoning
  • real time
  • case study
  • conditional independence