FEOL Monolithic Co-Integration of FeFET and CMOS on 8-Inch Wafer Using Laser Spike Annealing With Implementation of an FeFET Inverter.
Bohyeon KangJehyun AnJongseo ParkGiryun HongBeomjoo HamJaeseong PyoSung-Min AhnRock-Hyun BaekPublished in: IEEE Access (2024)