Load Balancing Among Photolithography Machines in the Semiconductor Manufacturing System.
Arthur M. D. ShrAlan LiuPeter P. ChenPublished in: J. Inf. Sci. Eng. (2008)
Keyphrases
- manufacturing systems
- load balancing
- dynamic load balancing
- cell formation
- flexible manufacturing systems
- distributed systems
- manufacturing environment
- complex systems
- petri net
- manufacturing processes
- fault tolerance
- grid computing
- parallel database systems
- load balance
- peer to peer
- holonic manufacturing systems
- round robin
- mobile agents
- low overhead
- load balancing strategy
- production line
- inter cell
- resource utilization
- distributed environment
- database systems