Linewidth Reconstruction Employing a Radial Basis Function Network in Optical Scatterometry.

Hung-Fei Kuo Muhamad Faisal Shun-Feng Su

Published in: IEEE Access (2016)

Keyphrases

radial basis function network
digital holography
multilayer perceptron
fuzzy model
self organizing maps
radial basis function
neural network
machine learning
neural network model
multi layer perceptron
genetic algorithm
simulation model
integrated circuit
fault detection
rule extraction