Capacitively coupled non-contact probing circuits for membrane-based wafer-level simultaneous testing.
Mutsuo DaitoYoshiro NakataSatoshi SasakiHiroyuki GomyoHideki KusamitsuYoshio KomotoKunihiko IizukaKatsuyuki IkeuchiGil-Su KimMakoto TakamiyaTakayasu SakuraiPublished in: ISSCC (2010)