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Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes.

Hiroshi NogeYosuke HagiharaKiyohiko KawanoHideki UedaTakaaki Yoshihara
Published in: IEICE Trans. Electron. (2008)
Keyphrases
  • resonant frequency
  • three dimensional
  • wide range
  • magnetic field
  • microstrip antenna
  • search space
  • multi dimensional
  • high precision
  • laser beam
  • real time
  • standard deviation
  • control algorithm
  • three dimensional objects