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Design and fabrication of micro hot-wire flow sensor using 0.35μm CMOS MEMS technology.
Zhuonan Miao
Christopher Y. H. Chao
Yi Chiu
Chia-Wei Lin
Yi-Kuen Lee
Published in:
NEMS (2014)
Keyphrases
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analog to digital converter
case study
cmos image sensor
high speed
single chip
participatory design
cost effective
cmos technology
user interface
sensor data
sensor technology
circuit design
design principles
image sensor
high density
real time
design process
sensor networks
information systems