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The effect of short beam length and gap distance on the resonance frequencies in Fishbone-shaped microelectromechanical system resonator.
Ryo Takahashi
Hidetoshi Miyashita
Kentaro Kinoshita
Sang-Seok Lee
Published in:
IEEE SENSORS (2016)
Keyphrases
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minimum distance
cross section
distance measure
distance metric
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euclidean distance
maximum distance
image sequences
bayesian networks
multiscale
feature vectors
maximum number
total length