Wavelet-coupled backpropagation neural network as a chamber leak detector of plasma processing equipment.

Byungwhan Kim Sanghee Kwon

Published in: Expert Syst. Appl. (2011)

Keyphrases

backpropagation neural network
back propagation
artificial neural networks
backpropagation neural networks
neural network
multiresolution
real time
multiscale
wavelet transform
denoising
training algorithm
genetic algorithm
knowledge base
feature vectors
multilayer perceptron