Xinlan Tang

Publication Activity (10 Years)

Years Active: 2024-2024
Publications (10 Years): 1

Top Topics

Automated Visual Inspection

Computational Efficiency

Semiconductor Manufacturing

Top Venues

Publications

Fei Yu, Min Xu, Junhua Wang, Xiangchao Zhang, Xinlan Tang
Balancing the Efficiency and Sensitivity of Defect Inspection of Non-Patterned Wafers with TDI-Based Dark-Field Scattering Microscopy. Sensors 24 (5) (2024)