Toshie Yoshioka

Publication Activity (10 Years)

Years Active: 2006-2006
Publications (10 Years): 0

Publications

Toshie Yoshioka, Takashi Miyoshi, Yasuhiro Takaya
Particle Detection for 100-nm Patterned Wafers by Evanescent Light Illumination - Analysis of Evanescent Light Scattering Using Finite-Difference Time-Domain Method -. J. Robotics Mechatronics 18 (6) (2006)