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Sauli Virtanen
Publication Activity (10 Years)
Years Active: 2017-2017
Publications (10 Years): 1
Top Topics
Chemical Vapor Deposition
Thin Film
Viewpoint
Multi Layer
Top Venues
ASICON
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Publications
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Zhen Zhu
,
Emma Salmi
,
Sauli Virtanen
Residual stress study of thin films deposited by atomic layer deposition.
ASICON
(2017)