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P. Fazan
Publication Activity (10 Years)
Years Active: 2002-2002
Publications (10 Years): 0
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Publications
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O. Jeandupeux
,
V. Marsico
,
A. Acovic
,
P. Fazan
,
H. Brune
,
K. Kern
Use of scanning capacitance microscopy for controlling wafer processing.
Microelectron. Reliab.
42 (2) (2002)